RFID Wafer Tracking: Semiconductor Manufacturing ...

RFID Wafer Tracking: Semiconductor Manufacturing: Entegris Wins Competitive Bid From Silterra for KA200 Peek Wafer Carriers

... "Entegris advanced wafer transport technology provides excellent dimensional stability and rigidity, low particulation, minimal outgassing at high temperatures and high thermal capabilities, which enable the efficient transport of valuable wafers within today's fabs. Composed of STAT-PRO 3000a static, dissipative blend of PEEK and carbon fiber the KA200 is configured with embedded radio frequency (RFID) tags for optimum wafer carrier identification and tracking in the fab. " ...