RFID Applications: Tegal Receives Endeavor AT PVD Tool Order From Leading Maker of ...

From Business Wire (press release), CA ... examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cell phones, PDAs and RFID applications; megapixel ...

" ... FBAR devices are an important new type of RF MEMS device used for controlling the wireless signals going into and coming out of radio frequency-based communication devices like cellphones and wireless networking cards. FBAR devices have important performance advantages over the Surface Acoustic Wave (SAW) filters they supplant, including having the ability to handle higher RF power levels and higher frequency applications, less temperature sensitivity and smaller size. The award-winning Endeavor series of PVD tools deposit consistent, high purity films with low to zero stress values in an extremely clean process environment. The Endeavor series of tools is already widely used in manufacturing advanced power devices, photo masks (including EUV), light emitting diodes (LED) and backside metallization of ultra-thin wafers ... "